Metrology Equipment

Our metrology capabilities are based on methods and equipment widely adopted by the Epi industry worldwide.

• Particle Control (KLA Tencor Surfscan 6220)
• 4 point probe measurement (RS30 Omni Map, ResMap178)
• Spreading resistance measurement (SSM130)
• Epi layer breakdown voltage measurement
• CV-measurement (SSM 495)
• Fourier spectral measurement (FS1201P)
• Wafer surface quality control (Reflex300, Reflex375)
• Microscopy («Jenatech», «Ergolux», «Latimet»)

To satisfy the growing requirements of the market to Epi wafer quality and parameter measurement accuracy Epiel regularly upgrades its metrology capability.