EPIwafers for ELectronics
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Metrology Equipment

Metrology Equipment

Our metrology capabilities are based on methods and equipment widely adopted by the Epi industry worldwide.

  • Particle Control (KLA Tencor Surfscan 6220)
  • 4 point probe measurement (RS30 Omni Map, ResMap178)
  • Spreading resistance measurement (SSM130)
  • Epi layer breakdown voltage measurement
  • CV-measurement (SSM 495)
  • Fourier spectral measurement (FS1201P)
  • Wafer surface quality control (Reflex300, Reflex375)
  • Microscopy («Jenatech», «Ergolux», «Latimet»)

To satisfy the growing requirements of the market to Epi wafer quality and parameter measurement accuracy Epiel regularly upgrades its metrology capability.

124460, Academic Valiyev str. 6, bld.2, Zelenograd, Moscow, Russia (on map)
Phone/Fax: +7 (499) 995 0049